Nanofabrication Cleanroom Safety
The UCR Nanofabricatoin Cleanroom management will conduct its operations in order to provide for the safety of the users and the protection of the equipment. Safe operation is the first priority in all clean room activities. All users are responsible for safety in their respective experiments and lab equipment usage. No task is so important and no experiment is so urgent that we can not take the time to perform our work safely. All cleanroom users are required to read each chemical handling SOP (Standard Operating Procedure) and sign the acknowledgement prior to gaining access to the cleanroom.
Roles and Responsibilities
- Responsible for all laboratory operations
- Responsible for all personnel in the laboratory
- Responsible for all laboratory equipment/facilities
- Coordinating and compliance of all activities related to hazardous control, fire, emergency response and safety
- Creating safety training programs and insuring user completion
- Maintain MSDS’s, UCR chemical Hygiene Plan and OSHA records
- Analyzing accident reports to identify program deficiencies
- Maintain chemical and gas inventory
General Laboratory Safety
All users are responsible for safety in the laboratory at all times. Follow safety guidelines. Report any hazardous condition immediately. Do not use any equipment you are not trained to operate.
- Never work at chemical benches alone; there must be at least two trained users present at all times when using hazardous chemicals.
- Do not use any equipment for which you have not been fully trained.
- Operation of the CVD Furnace requires the presence of staff on site.
- Do not operate any equipment in an unsafe condition; notify staff of any hazardous conditions immediately and then fill out the appropriate hazard notification forms.
- Report unsafe conditions or safety violations to laboratory staff.
- Know the locations of:
- Safety Showers and Eyewash stations
- Fire Extinguishers and First Aid kits
- Chemical Response kit and Equipment Emergency off buttons or switches
- Fire Alarms and Telephones
Material Safety Data Sheets
- MSDS Data Sheets are located in the clean room and on-line.
- Read the appropriate MSDS prior to using any chemical.
- Be sure the chemical you are using has an MSDS sheet and is listed in the chemical inventory list.
- Any chemical ordered should include an MSDS which must be given to safety staff to incorporate into the MSDS books.
- Only approved chemicals may be used in the lab and the chemical MSDS sheets must be in the MSDS books.
Read and Understand MSDS Sheets
- 1165 Remover
- 950 PMMA resist in Anisole
- AZ 400K Developer
- AZ 5214E Resist
- AZ 9245 Resist
- Aluminum Ethant Type A
- Ammonia Hydroxide
- BOE Etch
- Chromium Etchant
- Hydrochloric Acid
- Hydroflouric Acid
- Hydrogen Peroxide
- M-351 Developer
- MCC Primer
- MF-319 Developer
- MIBK Developer
- Microposit 351 Developer
- Phosphoric Acid
- Potassium Hydroxide
- S1813 Positive Resist
- Sodium Hydroxide
- Sulfuric Acid
Chemical Handling and Storage
- Any user wishing to use a hazardous material or acid must receive safety training by staff before any usage at any station in the laboratory.
- Always wear gloves when handling chemicals.
- Always wear safety glasses when handling chemicals.
- Chemical-resistant gloves, face shield and apron must be worn when pouring acids or any harmful chemical.
- Use appropriate fume hood (e.g. solvent hood for solvents, acid hood for acids and base hood for bases).
- Chemicals must be poured in open beakers under the appropriate chemical fume hood.
- Each person handling hazardous chemicals in the laboratory shall know the location of the closest emergency showers, eye washes, first aid kits, emergency exits, spill kits, fire extinguishers, telephones and fire alarm pull station. In an emergency, dial 911 from a campus phone.
- No open-toe or perforated shoes shall be allowed in the clean room.
Each person handling hazardous materials in the laboratory shall always wash hands after working with chemicals, even when gloves have been used.
- When diluting strong acids, it is generally safer to add acid to water as the water will absorb the heat generated by the dilution reaction.
- All chemicals must be labeled by the name of the chemical, strength of mixture, phone extension of owner.
- Use rubber or nalgene carriers when transporting chemicals through the lab. DO Not carry any hazardous chemical or acid bottles without a carrier.
- All chemicals must be stored in clearly marked containers of material compatible with chemical.
- All chemicals in open beakers must be marked with chemical type and strength, date and user name.
- Chemicals must be stored in the appropriate cabinet except when in actual use. Acids must be stored in acid cabinet, bases in the base cabinet and solvents in the solvent cabinet.
- Chemicals must not be left in beakers for appreciable amounts of time and should be disposed of after use.
- All acids are disposed of by pouring into acid hood drain or aspirator.
- All bases are disposed of by pouring into base hood drain or aspirator.
- All solvents are disposed into designated solvent waste containers.
- Use caution when heating chemicals on hot plates. (Ask staff for assistance)
- Rinse all beakers thoroughly after use.
- Rinse all empty acid bottles 3 times and store in acid cabinet on empty acid bottle shelves.
- Do not put chemical bottles on floor or leave next to the edge of hood.
- Chemicals should always be placed as far from front of hood as possible.
- Use tubs under the benches.
- Do not throw any empty chemical bottles in the trash.