CNSENF CLEANROOM TOOL RESERVATION SYSTEM
The Cleanroom online tool reservation system provides a means to reserve time on critical cleanroom tools. The system is maintained online at:
The lab manager will setup an account for users after they have completed training on the equipment. Once logged onto the system, users may reserve time only on equipment for which they have received full training.
Tools that require reservations:
E-beam Lithography System
E-beam Direct Write Lithography System
3D Confocal Microscope
4-Tube CVD Furnace
PECVD Deposition System
Reactive Ion Etch System
ICP Etch System
Rapid Thermal Aneal System (RTA)
Suss Mask Aligner
Quintel Mask Aligner
Matrix Plasma Asher
E-beam Evaporator
Sputter Evaporator
Thermal Evaporator
Focused Ion Beam (See FIB Engineer)
Ellipsometer
Dektak Profilometer
Reservation Policy
1. Reservations are accepted on a first-come-first-served basis. If machine time is not available for an extended period, consult the Lab Manager. Conflicts will be resolved on the basis of priority: DoD-funded projects will have precedence over all other funding sources (DoDGARS 32.34). Project time constraints and deadlines may be considered, particularly as they relate to DoD contracts. Super-users may have priority over standard users. Every effort will be made to accommodate UCR users who will have priority over non-UCR academic users.
2. Do not make a reservation that you cannot fully utilize as this denies others access to the equipment. Be Courteous!
3. Cancel your reservation as soon as you know that you can not keep it, and no less than 24hrs ahead of time.
4. You may be charged for no-shows or reservations that are not canceled before the scheduled time at the discretion of the Lab Manager.
5. Maximum length of a reservation is 4hrs without prior approval.
6. Reservation may be made up to 7 days in advance.
7. Please try to accommodate others by allowing prime time slots to be fairly distributed among users.
Lab Startup Phase (2006)
During the lab startup phase, access to the cleanroom and equipment will be on a limited basis; this mode of operation will continue until the cleanroom is fully staffed. The use of tools or equipment that requires either toxic gases or hazardous chemicals is forbidden, until such time as the lab is fully staffed and safety procedures for these items are in place. When the lab is stocked with chemicals or gases, ALL users will be required to have lab specific safety training. The CNSE purchased some equipment that was made operational prior to the Cleanroom project and the users of these tools may be trained in cleanroom protocol and allowed to continue to work with these tools inside the cleanroom. For user fees, go to the “Lab Usage Fees” Tab.
Reservation Procedure
Once you have been trained on a tool that requires a reservation, your trainer (Engineer or Super-user) must request that the lab manager allows your account access to that specific tool.
To access the new reservation system, go to Make a Reservation
Click on the Tool Set tab
Click on Cleanroom Tool Reservation System
This will bring you to the logon page with today's calendar.
Click the Log On button and use your username from the email and your new password.
Once logged on, you may make a reservation by clicking the drop down arrows and highlighting the requested tool and reservation time.
Your name will appear in the time slot next by the tool when your reservation is complete.
Use the calendar on the right of the screen to select a different day.
Come back to the same screen when you need to cancel a reservation.