Center For Nanoscale Science and Engineering

News

March 19, 2007

New Equipment Online

The new Nanofabrication Cleanroom is currently open for use 24/7 to trained users. The user base has grown to 70 trained users and the final two processing tools (CVD 4-tube furnace and Oxford ICP) dry etch systems are currently being started up by the manufacturers. Users are required to reserve time on specific tools via the online reservation system. (https://www.engr.ucr.edu/cgi-bin/nano/res/index.cgi) CNSE would like to welcome the cleanroom staff members:

Sr. Development Engineer- Dong Yan, ext. 2-6264 Sr. Development Engineer- Dexter Humphrey, ext. 2-6265 Asst. Development Engineer- Terry Traver, ext. 2-3388

The staff has been working with outside contractors and tool vendors to complete the hook-up phase, write procedures and process recipes, facility completion, tooling, engineering and maintenance as well as training new users on equipment and lab protocol.

The center.s first three powerful Nanoscale systems (Ebeam Lithography, FIB and AFM) are also fully operational. The Focused Ion Beam is now capable of In-Situ TEM foil preparation using the Ascend Extreme Access micromanipulator probe. For a consultation appointment on how the FIB can meet your research needs, or for training on the new Dimension 5000 AFM or E-beam Lithography system please contact:

Dong Yan
Ext. 2-6264
dongyan@engr.ucr.edu

For all other inquiries, contact:
Mark Heiden
Ext. 2-2551
mheiden@engr.ucr.edu

For information on how to become a user of the CNSE Nanofab Cleanroom, go to the User Policies tab.
http://www.cnse.ucr.edu/user_policies/

March 13, 2006
Tool Hookup

June 7, 2005
Construction Images updated!

January 14, 2005
Construction Images available!

September 3, 2004
Construction Has Begun On the Bourns Hall Nanofabrication Cleanroom!


Director's Message Research People Education Tool Set News Lab Capabilities User Policies Employment
News March 19, 2007 New Equipment Online The new Nanofabrication Cleanroom is currently open for use 24/7 to trained users. The user base has grown to 70 trained users and the final two processing tools (CVD 4-tube furnace and Oxford ICP) dry etch systems are currently being started up by the manufacturers. Users are required to reserve time on specific tools via the online reservation system. (https://www.engr.ucr.edu/cgi-bin/nano/res/index.cgi) CNSE would like to welcome the cleanroom staff members: Sr. Development Engineer- Dong Yan, ext. 2-6264 Sr. Development Engineer- Dexter Humphrey, ext. 2-6265 Asst. Development Engineer- Terry Traver, ext. 2-3388 The staff has been working with outside contractors and tool vendors to complete the hook-up phase, write procedures and process recipes, facility completion, tooling, engineering and maintenance as well as training new users on equipment and lab protocol. The center.s first three powerful Nanoscale systems (Ebeam Lithography, FIB and AFM) are also fully operational. The Focused Ion Beam is now capable of In-Situ TEM foil preparation using the Ascend Extreme Access micromanipulator probe. For a consultation appointment on how the FIB can meet your research needs, or for training on the new Dimension 5000 AFM or E-beam Lithography system please contact: Dong Yan Ext. 2-6264 dongyan@engr.ucr.edu For all other inquiries, contact: Mark Heiden Ext. 2-2551 mheiden@engr.ucr.edu For information on how to become a user of the CNSE Nanofab Cleanroom, go to the User Policies tab. http://www.cnse.ucr.edu/user_policies/ March 13, 2006 Tool Hookup June 7, 2005 Construction Images updated! January 14, 2005 Construction Images available! September 3, 2004 Construction Has Begun On the Bourns Hall Nanofabrication Cleanroom!
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