<< Back to Toolset

Tool # 5 Thermal Evaporator
The Thermal Evaporator (tool #5) is also a Temescal BJD 1800 system similar to the E-beam evaporator. (tool #4) This system applies thin-films of various metals onto substrates by evaporating metal in a high vacuum, however the Thermal Evaporator heats the material by passing electrical current through a filament much like a light bulb. The filament is designed with a dimple in the middle to accommodate the material to be evaporated. The thickness is controlled by electronic feedback systems, and specific tooling geometries allow excellent coverage to be achieved on a variety of substrate sizes up to a diameter of 4''.
There is currently no Procedure Manual available for download for this tool.