The Initial Toolset ( Cleanroom Tool Reservation System )
| Current Area Name | Tool ID | Equipment Description | Manufacturer | Model |
|---|---|---|---|---|
| Thin Films/Etch | Item 11 | Furnace (4 Tube) | CVD Equipment | 4 Stack |
| Thin Films/Etch | Item 3 | PECVD (Oxide, Nitride) | Unaxis/Plasma Therm | 790 |
| Thin Films/Etch | Item 4 | E-Beam Evaporator | Temescal | BJD-1800 |
| Thin Films/Etch | Item 5 | Thermal Evaporator | Temescal | BJD-1800 |
| Thin Films/Etch | Item 52 | Rapid Thermal Annealer | MPT Corp. | RTP 600S |
| Thin Films/Etch | Item 53 | Deep Reactive Ion Etcher | STS | Multiplex RIE |
| Thin Films/Etch | Item 8A | Spin Rinser Dryer | Semitool | ST-880D |
| Thin Films/Etch | Item 54 | Oxford Plasmalab 100/180 | Oxford | Multiplex ICP |
| Thin Films/Etch | Item 6 | Metal Sputtering | Temescal | BJD-1800 |
| Photo/Metrology | Item 15 | Mask Aligner | Suss MicroTec | MA 6 |
| Photo/Metrology | Item 15A | Mask Aligner | Quintel | Q4000 |
| Photo/Metrology | Item 21 | Optical Microscope | Nikon | Eclipse L150 |
| Photo/Metrology | Item 21A | 3D Confocal Microscope | Hyphenated Systems | H-S150 OP |
| Photo/Metrology | Item 58 | Focused Ion Beam Mill | Leo | 1540XB |
| Photo/Metrology | Item A2 | C/V Stress (plotter) | MDC | O'halloran |
| Photo/Metrology | Item A3 | Thin film stress gauge | Dektak | Software pkg. with Dektak 8 |
| Photo/Metrology | Item 23 | Surface Profilometer | Dektak | Dektak 8 |
| Lithography | Item N/A | Atomic Layer Deposition | Cambridge Nanotech | Savannah 100 |
| Lithography | Item 16 | Resist Coat Spin Station | Headway/SCE | Fab to spec |
| Lithography | Item 13 | 8' Wet Bench (acid) | SCE | Fab to spec |
| Lithography | Item 7A | 7' Wet bench (base) | SCE | Fab to spec |
| Lithography | Item 7B | 6' Solvent Bench | SCE | Fab to spec |
| Lithography | N/A | Chemical Processing Station | CPK | Polos 200 ACD |
| Photo/Metrology | Item 24B | Ellipsometer | Uvisel | FUV200 |
| Photo/Metrology | Item 1 | Batch Plasma Etcher/Asher | Matrix | System One |
| Photo/Metrology | Item 8B | Spin Rinser Dryer | Semitool | ST-880D |
| Photo/Metrology | Item 9 | SEM/E Beam Lithography | Leo | 1550 |
| Photo/Metrology | 25B | IV Probe station | Signatone | CM200 |
| Photo/Metrology | 70 | Atomic Force Microscope | Veeco | Dimension 5000 |