The Surface Profilometer (tool #23) and Thin Film Stress Gauge (tool #A3) are combined in one tool - the Veeco systems Dektak 8. The system is a Bench-Top Surface Profiler that measures the step heights of any surface, with a programmable stylus, which applies a force down to 1 milligram and a Z-height capability up to 1 millimeter. It has a low-inertia sensor to deliver extremely accurate step heights, surface roughness, and waviness measurements on samples up to 8 inches in diameter. Advanced 3D data analysis software for surface characterization of MEMS, semiconductors and other thin/thick films. The system provides 7.5 angstrom, 1 sigma step height repeatability. Stress measurements are achieved by measuring the curvature profile of a substrate before and after a given process step. The software allows the calculation of the added stress based on the known material properties and variations in curve profile.