Chemical Processing Station
The Chemical Processing Spin Station is a standalone spinner
configured to deliver wet chemicals to the surface of the substrate in
a controlled safe manner. The system will be configured for sulfuric
acid/hydrogen peroxide mixing to clean the surface of the wafer. The
operator simply places the dry wafer onto the spin chuck, selects the
preferred recipe, and the system will dispense the chemical, rinse and
dry the part. The operator never comes into contact with the
chemicals.