Center For Nanoscale Science and Engineering

IV Probe station

The I/V Probe Station (tool #25B) Consists of a Signatone S1160 probe station and Agilent E5270A Analyzer. This is a desktop low current low-noise system for DC and AC characterization, and failure analysis on semiconductor wafers and devices. The unit is equipped with X-Y and Z probe micro-positioning, operator microscope and will accept both magnetic base and vacuum base micro-positioners. The Agilent precision DC parametric analyzer with source-monitor-unit (SMU) plug-ins provide current ranges from fempto-Ampère (1E-15) to several Ampères, and potentials from micro-Volt to the hundreds of Volts. This allows the full characterization of devices under test in all four I-V quadrants (forward and reverse currents and voltages are measured with the same SMU unit).


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<< Back to Toolset IV Probe station The I/V Probe Station (tool #25B) Consists of a Signatone S1160 probe station and Agilent E5270A Analyzer. This is a desktop low current low-noise system for DC and AC characterization, and failure analysis on semiconductor wafers and devices. The unit is equipped with X-Y and Z probe micro-positioning, operator microscope and will accept both magnetic base and vacuum base micro-positioners. The Agilent precision DC parametric analyzer with source-monitor-unit (SMU) plug-ins provide current ranges from fempto-Ampère (1E-15) to several Ampères, and potentials from micro-Volt to the hundreds of Volts. This allows the full characterization of devices under test in all four I-V quadrants (forward and reverse currents and voltages are measured with the same SMU unit).
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