The Mask Aligner (tool #15A) is a Quintel Model Q4000-6. This supplemental Aligner is also a contact printer capable of 1 micron resolution like the Suss MA6. Configured with Deep UV exposure, and UV/IR backside alignment capability, this system will provide a redundant tool for a high utilization area of the clean room. Substrates up to 6" in diameter can be used with tooling available for small sample pieces. Alignment modes include vacuum contact for highest resolution and soft contact for minimum substrate damage.