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Tool # 15 Karl Suss Mask Aligner
The Mask Aligner (tool #15) is a Karl Suss Model MA-6. This Aligner is a contact printer capable of 1 micron resolution or better, using standard lithographic techniques. Substrates up to 6" in diameter can be used with tooling available for small sample pieces. The mask aligner places an image onto the substrate with precision alignment capability and then exposes the photosensitive resist through a mask with ultra-violet light. The substrate is subsequently developed, exposing the specific pattern for further etching or plating processes. Alignment is achieved manually to an accuracy of <0.25 microns. Alignment modes include vacuum contact for highest resolution and soft contact for minimum substrate damage.
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