The Focused Ion Beam Milling system (FIB, tool #58) is a Leo XB1540. This workstation combines the imaging capabilities of the GEMINI field emission column with a high performance focused ion beam. Features include a comprehensive gas injection system for ion beam deposition of metals or insulators and for enhanced etching, infra-red CCD cameras and 5-dimensional stage for live specimen handling and navigation monitoring. This tool provides analytical capabilities, TEM sample preparation, cross section investigation, three- dimensional structural examination and fabrication, failure analysis and MEMS fabrication capability.