The Ellipsometer system (tool #24B) is a UVISEL Spectroscopic Phase Modulated Ellipsometer (SPME) that incorporates a photo-elastic device to modulate the polarization without any mechanical movement. The UVISEL FUV extends the range of measurements down to 190 nm. The FUV200 integrates two different detectors (solar blind and UV/vis PMT detectors) to provide an extremely low level of stray light. Combined with high throughput optics, this ellipsometer provides very high sensitivity and precision without compromise. The FUV range is often required for lithography applications, characterization of metals, high k dielectrics and organic materials as well as increased sensitivity to ultra-thin films.