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Tool #4 E-Beam Evaporator
The E-Beam Evaporator (tool #4) is a Temescal BJD 1800 system designed for Universities and Research and Development operations. The system focuses a beam of electrons onto a metal target in a crucible to apply a thin metal film onto substrates by evaporation in a high vacuum. The thickness is controlled by electronic feedback systems, and specific tooling geometries allow excellent coverage to be achieved on a variety of substrate sizes up to a diameter of 4''.